Design and simulation of a membranes-based acoustic sensors array for cochlear implant applications
PDF

Keywords

MEMS
Microphone
Capacitive
Cochlear
Implant
Simulation

How to Cite

Quiroz, G., Báez, H., Mendoza, S., Alemán, M., & Villa, L. (2014). Design and simulation of a membranes-based acoustic sensors array for cochlear implant applications. Superficies Y Vacío, 27(1), 24-29. Retrieved from https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/150

Abstract

In this work we present the design and simulation of an acoustic sensors array for detecting specific frequencies in a range, and allowing their identification from a complex audio signal in order to develop an application for cochlear implants. The sensitivity is obtained when a membrane resonates when stimulated by an audio signal which behaves as a mechanical wave. The structure of each sensor is designed with the concept of MEMS capacitive microphones, formed by a flexible membrane between two rigid backplates. The variation of the distance between the membrane and backplates generates a capacitance change that can pass to an electronic readout circuit. The structure has been designed as a massspring system where a set of springs, with the same elastic properties, holds the flexible membrane.
PDF

References

C. Luo, J. H. McClellan, and P. T. Bhatti, Introductory Signal Processing Labs Based on Filterbank Applications, in Proc. of the IEEE Digital Signal Processing Workshop and IEEE Signal Processing Education Workshop (DSP/SPE), pp. 90-94 (2011).

P. Loizou, IEEE Signal Processing Magazine, 15, 101 (1998).

T. Kasai, S. Sato, S. Conti, I. Padovani, F. David, and Y. Uchida, Novel Concept for a MEMS Microphone with Dual Channels for an Ultrawide Dynamic Range, in Proc. of the IEEE 24th International Conference on Micro Electro Mechanical Systems, pp. 605–608 (2011).

C. Chan, W. Lai, and M. Wu, IEEE Sensors Journal, 11, 2365 (2011).

J. Liu, D. Martin, T. Nishida, L. N. Cattafesta, M. Sheplak, and B. P. Mann, Journal of Microelectromechanical Syst., 17, 698 (2008).

T. Ganchev, N. Fakotakis, and G. Kokkinakis, Comparative Evaluation of Various MFCC Implementations on the Speaker Verification Task, (SPECOM-2005).

SUMMiT V Five Level Surface Micromachining Technology Design Manual, version 3.2, October 25, 2012. Sandia National Laboratories, MEMS Technologies Department, Microelectronics Development Laboratory, 2012.

Dare A. Wells, Schaum’s Theory and Problems of Lagrangian Dynamics. (Schaum-Publishing Co., 1967).

D. T. Martin, J. Liu, K. Kadirvel, R. M. Fox, M. Sheplak, and T. Nishida, Journal of Microelectromechanical Systems, 16, 1289, (2007).

J. Bagdahn, W. N. Sharpe, and O. Jadaan, Journal of Microelectromechanical Systems, 12, 302 (2003).

W. N. Sharpe, R. Vaidyanathan, and R. L. Edwards, Measurements of Young’s Modulus, Poisson's Ratio, and Tensile Strength of Polysilicon, in Proc. of the IEEE 10th Annual International Workshop on Micro Electro Mechanical Systems, pp. 424-429 (1997).