Microelectronics and Mems

Chairmen: Dr. WilfridoCalleja (INAOE), wcalleja@inaoep.mx
Dr. Aurelio H. Heredia Jiménez (UPAEP),aureliohoracio.heredia@upaep.mx
José Mireles Jr. (UACJ) jmireles@uacj.mx

The mission of this joint Microelectronics and MEMS (MicroSystems) Symposium is to bring together scientists and technologists interested in these two interrelated fields. The program will highlight recent advances in the design and fabrication of integrated circuits (IC´s), Microelectronics Technology, Materials Science for Micro and Nanoelectromechanical devices and systems (NEMS), as well as the different strategies for the integration and packaging of MEMS and NEMS.

Microelectronics; which in its widest conception includes the design, fabrication, characterization, and modeling of micro- and nano- devices, and circuits, has emerged as the fundamental technology for the fabrication of Microsystems. In this field, it is interesting to analyze the scaling laws and size regimes in which macro theories start requiring further non-linear analysis. The purpose is to obtain a deeper understanding of the physical consequences of downscaling electrostatic, electromagnetic, fluidic, optical, thermal, chemical devices, and some combinations of them. It is of great importance to study the non-linear behavior of miniaturized devices and systems, which apart from reason involving economics, volume and weight, can lead to new operating principles and even to increase the system performance.

During the past few years, several Mexican research groups have received grants for the development of MEMS/NEMS, and some facilities for the design, fabrication, packaging and characterizing of these systems are now available in Mexico. In this regard, FUMEC (Fundación México EstadosUnidospara la Ciencia) and Secretaría de Economía (SE) have encouraged and supported the development of a National Network for MEMS.

Technical Program:

The Microelectronics and MEMS Symposium will host oral and poster sessions focused on the integration of materials and processes for developing MEMS/NEMS devices. Invited Talks, Oral and Poster Session will include the following topics:

  • Design, characterization, and modeling of IC´s
  • Amorphous Materials and compound Semiconductors
  • Characterization and Modeling of Circuits with Sensors/Actuators
  • Microsystems design (MEMS/NEMS)
  • Bulk and Surface Micromachining
  • Radio Frequency CMOS-MEMS
  • Integrated Optics
  • BioMEMS and Lab on a Chip
  • AerospaceApplications
  • ChemicalSensorsApplications
  • AutomotiveApplications